Browsing by Author "Biswas, R."
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Publication Defectivity in chemical mechanical planarization: A multiscale approach
Proceedings paper2008, Proceedings 13th Int. Conference on Chemical-Mechanical Polish (CMP) Planarization for ULSI Multilevel Interconnection - CMP-MIC, 4/03/2008, p.107-112Publication Prediction of scratch generation in chemical mechanical planarization
Journal article2008, CIRP Annals. Manufacturing Technology, (47) 1, p.559-562