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Browsing by Author "Bittner, Christian"

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    Implanted photoresist remover for advanced nodes including SiGe, Ge and high k-metals

    Braun, S.
    ;
    Vos, Rita  
    ;
    Klipp, Andreas
    ;
    Claes, Martine  
    ;
    Bittner, Christian
    ;
    Albert, Johan
    Proceedings paper
    2013, Ultra Clean Processing of Semiconductor Surfaces XI - UCPSS, 17/09/2012, p.17-20

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