Repository logo Institutional repository
  • Communities & Collections
  • Scientific publicationsOpen knowledge
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Blietz, M."

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results per page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Bulk micro defects of p/p epitaxial silicon wafers with nitrogen doped substrates and their gettering behavior

    Schmolke, R.
    ;
    Blietz, M.
    ;
    Hölzl, R.
    ;
    Menzel, D.
    ;
    Bender, Hugo  
    Proceedings paper
    2002, Semiconductor Silicon 2002. Proceedings of the 9th International Symposium on Silicon Materials Science and Technology, 12/05/2002, p.658-669

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings