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Browsing by Author "Blum, W."

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    The influence of capping layer type on cobalt salicide formation in films and narrow lines

    Besser, Paul  
    ;
    Lauwers, Anne  
    ;
    Roelandts, Nico
    ;
    Maex, Karen  
    ;
    Blum, W.
    ;
    Alvis, R.
    ;
    Stucchi, Michele  
    Proceedings paper
    1998, Advanced Interconnects and Contact Materials and Processes for Future Integrated Circuits, 13/04/1998, p.375-380

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