Browsing by Author "Borden, Peter"
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Publication Carrier illumination for characterization of ultra-shallow doping profiles
Proceedings paper2003, Ultra Shallow Junctions. 7th Int. Worksh. Fabrication, Characterization and Modeling of Ultra Shallow Doping Profiles in Semic., 27/04/2003, p.321-330Publication On the sensitivity of carrier illumination to processing steps
Oral presentation2003, International Conference on Characterization and Metrology for ULSI Technology