Browsing by Author "Boutkabout, Hakim"
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Publication Selective wet etching of Hf-based layers
Meeting abstract2003, 204th Meeting of the Electrochemical Society: 2nd Int. Symp. on High Dielectric Constant Materials, 13/10/2003Publication Selective wet etching of HF-based layers
Proceedings paper2004, Physics and Technology of High-k Gate Dielectrics II, 12/10/2003, p.165-174