Browsing by Author "Breitschwerdt, K."
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Publication Thin film encapsulation of acceleration sensors using polysilicon sacrificial layers
;Stahl, H. ;Hoechst, A. ;Fischer, F. ;Metzger, L. ;Reichenbach, R. ;Laermer, F.Kronmueller, S.Proceedings paper2003, Proceedings of Transducers. The 12th International Conference on Solid-State Sensors, Actuators and Microsystems, 8/06/2003, p.1899-1902