Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
Browse by Author
Browsing by Author "Broekaart, M."
Browse
Filter results by typing the first few letters
All browse results
Now showing
1 - 1 of 1
Results Per Page
1
5
10
20
40
60
80
100
Sort Options
Ascending
Descending
Loading...
Loading...
Publication
Integration of low-k dielectric films in damascene processes
Hoofman, Romano
;
Nguyen Hoang, Viet
;
Arnal, V.
;
Broekaart, M.
;
Gosset, L.G.
;
Besling, W.F.A.
Show more
Book chapter
2007