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Browsing by Author "Brown, G."

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    Effect of Fe contamination on quality of poly silicon gate structures

    Mertens, Paul  
    ;
    De Gendt, Stefan  
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    Depas, Michel
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    Kenis, Karine  
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    Opdebeeck, Ann  
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    Snee, Peter
    ;
    Gräf, D.
    Proceedings paper
    1996, Proceedings of the 3rd International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS, 23/09/1996, p.33-36
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    The impact of Fe and Cu on the minority carrier lifetime of P and N-type silicon wafers

    Rotondaro, Antonio
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    Hurd, Trace
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    Kaniava, Arvydas
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    Vanhellemont, Jan
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    Simoen, Eddy  
    ;
    Heyns, Marc  
    Proceedings paper
    1995, ALTECH 95: Analytical Techniques for Semiconductor Materials and Process Characterization II. Proceedings of the Satellite Sympo, 28/09/1995, p.54-63

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