Browsing by Author "Brown, G."
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Publication Effect of Fe contamination on quality of poly silicon gate structures
; ; ;Depas, Michel; ; ;Snee, PeterGräf, D.Proceedings paper1996, Proceedings of the 3rd International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS, 23/09/1996, p.33-36Publication The impact of Fe and Cu on the minority carrier lifetime of P and N-type silicon wafers
Proceedings paper1995, ALTECH 95: Analytical Techniques for Semiconductor Materials and Process Characterization II. Proceedings of the Satellite Sympo, 28/09/1995, p.54-63