Browsing by Author "Brown, Ian"
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Publication Development of integrated wet cleans for 3D-SIC technologies
Proceedings paper2013, Ultra Clean Processing of Semiconductor Surfaces XI - UCPSS, 17/09/2012, p.150-153Publication UV-induced modification of fluorocarbon polymer for improvement of wet removal
; ; ; Journal article2014, Microelectronic Engineering, 114, p.136-140Publication UV-induced modification of fluorocarbon polymer for improvement of wet removal
; ; ; Meeting abstract2012, Sematech Surface Preparation and Cleaning Conference - SPCC, 19/03/2012