Browsing by Author "Brown, Jim"
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Publication Inspection challenges for triple patterning at sub-14 nm nodes with broadband plasma inspection platforms
Proceedings paper2015, 26th Annual SEMI Advanced Semiconductor Manufacturing Conference - ASMC, 3/05/2015, p.19-22Publication The use of eDR-71xx for DSA defect review and automated classification
Proceedings paper2015, Metrology, Inspection, and Process Control for Microlithography XXIX, 21/02/2015, p.94242F