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    Optical proximity effects and correction strategies for chemical amplified DUV resists

    Op de Beeck, Maaike  
    ;
    Bruggeman, Albert
    ;
    Botermans, Harry
    ;
    Van Driessche, Veerle  
    ;
    Yen, Anthony
    Proceedings paper
    1996, Optical Microlithography IX, 10/03/1996, p.622-633

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