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Browsing by Author "Burke, Edd"

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    Tungsten planarization by gas cluster ion beam with CHF3

    Everaert, Jean-Luc
    ;
    Fernandez, Luis
    ;
    Vos, Ingrid  
    ;
    Van Ammel, Annemie  
    ;
    Vrancken, Christa  
    Meeting abstract
    2013, Materials for Advanced Metallization - MAM, 10/03/2013, p.117-118

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