Browsing by Author "Busnaina, Ahmed"
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Publication Collapse behavior and forces of multistack patterns
Proceedings paper2008, Sematech Surface Preparation and Cleaning Conference, 31/03/2008Publication Pattern collapse and particle removal forces of interest to semiconductor fabrication process
Journal article2009, Solid State Phenomena, 145-146, p.47-50Publication Quantitative measurement of pattern collapse and particle removal force
Proceedings paper2007, Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing 10, 7/10/2007, p.123-129