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Browsing by Author "Busnaina, Ahmed A."

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    Collapse behavior and forces of multistack nanolines

    Kim, Tae-Gon
    ;
    Wostyn, Kurt  
    ;
    Mertens, Paul  
    ;
    Busnaina, Ahmed A.
    ;
    Park, Jin-Goo
    Journal article
    2010, Nanotechnology, (21) 1, p.15708
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    Pattern collapse and particle removal forces of interest to semiconductor fabrication process

    Kim, Tae-Gon
    ;
    Wostyn, Kurt  
    ;
    Park, Jin-Park
    ;
    Mertens, Paul  
    ;
    Busnaina, Ahmed A.
    Oral presentation
    2008, 9th International Symposium on Ultra Clean Processing of Semiconductor Surfaces - UCPSS

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