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Browsing by Author "Buttgereit, Uwe"

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    Using the AIMS 45-193i for hyper-NA imaging applications

    De Bisschop, Peter  
    ;
    Philipsen, Vicky  
    ;
    Birkner, Robert
    ;
    Buttgereit, Uwe
    ;
    Richter, Rigo
    Proceedings paper
    2007, SPIE Photomask Technology (BACUS), 18/09/2007, p.67301G

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