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Browsing by Author "Calbo, Giovanni"

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    Characterization of plasma damage in low-k films by TVS measurements

    Ciofi, Ivan  
    ;
    Baklanov, Mikhaïl
    ;
    Calbo, Giovanni
    ;
    Tokei, Zsolt  
    ;
    Beyer, Gerald  
    Proceedings paper
    2009, Materials, Processes and Reliability for Advanced Interconnects for Micro- and Nanoelectronics, 13/04/2009, p.1156-D01-08

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