Browsing by Author "Callewaert, Sven"
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Publication Scanning spreading resistance microscopy and spectroscopy for routine and quantitative 2D-carrier profiling
Proceedings paper2001, 6th Int. Workshop on Fabrication, Characterization and Modeling of Ultra-Shallow Doping Profiles in Semiconductors - USJ, 22/04/2001, p.182-191Publication Scanning spreading resistance microscopy and spectroscopy for routine and quantitative two-dimensional carrier profiling
Journal article2002, Journal of Vacuum Science & Technology B, (20) 1, p.471-478Publication Towards routine, quantitative two-dimensional carrier profiling with Scanning Spreading Resistance Microscopy
Oral presentation2000, International Workshop on Metrology for ULSI ; 2000; NIST.Publication Towards routine, quantitative two-dimensional carrier profiling with scanning spreading resistance microscopy
Proceedings paper2001, Characterization and Metrology for ULSI Technology 2000: International Conference; Gaithersburg, Maryland, 26-29 June 2000., p.613-619