Browsing by Author "Camillo-Castillo, Renata"
Now showing 1 - 1 of 1
- Results per page
- Sort Options
Publication Effect of varying the initial conditions prior to flash-assist rapid thermal processing on dopant activation, diffusion, and defect populations
Oral presentation2005, 8th International Workshop on the Fabrication, Characterization and Modeling of Ultra-Shallow Junctions in Semiconductors