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Browsing by Author "Campisano, S. U."

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    Titanium silicidation and secondary defect annihilation in ion beam processed SiGe layers

    Kyllesbech Larsen, K.
    ;
    La Via, F.
    ;
    Lombardo, S.
    ;
    Raineri, Vito
    ;
    Alves Donaton, Ricardo
    Proceedings paper
    1996, Silicide Thin Films - Fabrication, Properties, and Applications, 27/11/1995, p.149-154

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