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Browsing by Author "Campos Garcia, Diana"

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    Profile control for low-k patterning using TaN and TiN metallic hardmasks

    Struyf, Herbert  
    ;
    Hendrickx, Dirk  
    ;
    Paraschiv, Vasile  
    ;
    Campos Garcia, Diana
    ;
    Mannaert, Geert  
    Oral presentation
    2007, MRS Spring Symposium B: Materials, Processes, Integration and Reliability in Advanced Interconnects for Micro- and Nanoelectron

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