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Browsing by Author "Cao, Zhitao"

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    On the thermal stability of physically-vapor-deposited diffusion barriers in 3D through-silicon vias during IC processing

    Civale, Yann
    ;
    Croes, Kristof  
    ;
    Miyamori, Yuichi
    ;
    Velenis, Dimitrios  
    ;
    Redolfi, Augusto  
    Journal article
    2013, Microelectronic Engineering, 106, p.155-159

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