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Browsing by Author "Capodieci, Luigi"

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    Qualification of electrical linewidth measurements (ELM) as a metrology tool for 0.18μm and below

    Marschner, Thomas
    ;
    Pollentier, Ivan  
    ;
    Baerts, Christina  
    ;
    Boltz, Ingo
    ;
    Ronse, Kurt  
    Proceedings paper
    1998, Proceedings of the Microlithography Symposium. Interface '98, 15/11/1998, p.263-276

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