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Browsing by Author "Carnevale, G."

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    Strain determination in silicon microstructures by combined convergent beam electron diffraction, process simulation, and micro-Raman spectroscopy

    Senez, V.
    ;
    Armigliato, A.
    ;
    De Wolf, Ingrid  
    ;
    Carnevale, G.
    ;
    Balboni, R.
    ;
    Frabboni, S.
    Journal article
    2003, Journal of Applied Physics, (94) 9, p.5574-5583

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