Browsing by Author "Carpaij, R."
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Publication Characterization of integrated optical CD for process control
; Viswanathan, A.Proceedings paper2004, Metrology, Inspection, and Process Control for Microlithography XVIII, 22/02/2004, p.1059-1068Publication Freeform illumination sources: Source mask optimization for 22 nm node SRAM
Proceedings paper2009, 6th International Symposium on Immersion Lithography Extensions, 22/10/2009Publication In-line litho cluster monitoring and control using integrated scatterometry
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