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Browsing by Author "Carr, Philip"

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    U.V. activated cleaning using NO, HCl and NO/HCl

    Elsmore, Chris
    ;
    Gluck, Ronald
    ;
    Carr, Philip
    ;
    Meuris, Marc  
    ;
    Mertens, Paul  
    ;
    Heyns, Marc  
    Proceedings paper
    1994, Proceedings of the 2nd International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS, 19/09/1994, p.125-129

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