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Browsing by Author "Carruthers, Mark"

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    Impact of backside processing on C-V characteristics of TSV capacitors in 3D stacked IC process flows

    De Vos, Joeri  
    ;
    Stucchi, Michele  
    ;
    Jourdain, Anne  
    ;
    Beyne, Eric  
    ;
    Patel, Jash
    ;
    Crook, Kath
    Proceedings paper
    2015, 17th Electronics Packaging Technology Conference - EPTC, 2/12/2015, p.1-4

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