Browsing by Author "Chae, Heeyeop"
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Publication Hydrogenated amorphous carbon films deposited using plasma enhanced chemical vapor deposition processes
; Chae, HeeyeopJournal article review2023, KOREAN JOURNAL OF CHEMICAL ENGINEERING, (40) 6, p.1268-1276Publication Temperature Effects on Reaction Kinetics of Hydrogenated Amorphous Carbon Deposition in Inductively Coupled C2H Plasmas
Journal article2026, KOREAN JOURNAL OF CHEMICAL ENGINEERING, (43) 5, p.1403-1413