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Browsing by Author "Chae, Yoo-jin"

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    Publication

    Defect avoidance for extreme-ultraviolet mask defects using intentional pattern deformation

    Chae, Yoo-jin
    ;
    Jonckheere, Rik  
    ;
    Gupta, Puneet
    Proceedings paper
    2018, International Conference on Extreme Ultraviolet Lithography, 17/09/2018, p.108091H

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