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Browsing by Author "Chalishazar, Aditya"

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    Atomic layer deposition of aluminum phosphate layers using tris(dimethylamino)phosphine as P-precursor

    Blomme, Ruben
    ;
    Chalishazar, Aditya
    ;
    Henderick, Lowie
    ;
    Munnik, Frans
    ;
    Meersschaut, Johan  
    Journal article
    2025-MAR, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, (43) 2, p.022409

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