Browsing by Author "Chen, Chao-Heng"
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Publication High-NA EUV Optical Proximity Correction Modeling Flow: from Data Preparation to Model Validation
;Wei, Chih-, I ;Chen, Chao-Heng ;Thakare, Devesh ;Levinson, Zachary ;Nge, Philip C. W.Schatz, JirkaProceedings paper2025, Photomask Technology, 2025-06-04, p.136870Q