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Browsing by Author "Chen, Chun-Ho"

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    DUV resist profile improvement on TiN deposited metal layer

    Lin, Chia-Hui
    ;
    Chen, Chun-Ho
    ;
    Jenq, Jhy-Sayang
    ;
    Op de Beeck, Maaike  
    ;
    Van den hove, Luc  
    Proceedings paper
    1996, Optical Microlithography IX, 13/03/1996, p.427-436

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