Browsing by Author "Chen, J.F."
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Publication Separable models for computational lithography
;Liu, Hua-Yu ;Zhao, Q. ;Chen, J.F. ;Jiang, J. ;Socha, B. ;Van Setten, E. ;Engelen, A.Meessen, J.Proceedings paper2008, Photomask and Next-Generation Lithography Mask Technology XV, 16/04/2008, p.70280X