Browsing by Author "Chen, Jeremy"
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Publication 2D inner assist features for 0.55NA: mask wafer data characterization
Proceedings paper2025, Photomask Technology, 2025-09-22, p.136871IPublication At-resolution stitching with high-reflectivity low-n masks
Journal article2025, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (24) 4, p.041204Publication The performance evaluation of at-resolution stitching on NXE
Proceedings paper2025, 40th European Mask and Lithography Conference (EMLC), 2025-06-26, p.1378715