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Browsing by Author "Chen, Luoqi"

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    Accurate models for EUV lithography

    Hendrickx, Eric  
    ;
    Lorusso, Gian  
    ;
    Jiang, Jiong
    ;
    Chen, Luoqi
    ;
    Lui, Wei
    ;
    Van Setten, Eelca
    Proceedings paper
    2009, Photomask Technology 2009, 14/09/2009, p.74882G
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    SLM device for 193 nm lithographic applications

    Lauria, John
    ;
    Albright, Ronald
    ;
    Vladimirsky, Olga
    ;
    Chen, Luoqi
    ;
    Hoeks, Maarten
    ;
    Vanneer, Roel
    Meeting abstract
    2008, MNE, 15/09/2008

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