Browsing by Author "Chen, Luoqi"
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Publication Accurate models for EUV lithography
Proceedings paper2009, Photomask Technology 2009, 14/09/2009, p.74882GPublication SLM device for 193 nm lithographic applications
;Lauria, John ;Albright, Ronald ;Vladimirsky, Olga ;Chen, Luoqi ;Hoeks, MaartenVanneer, RoelMeeting abstract2008, MNE, 15/09/2008