Browsing by Author "Chen, Parkson W."
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Publication Advanced optical imaging platform for CD metrology and defect review on 130-nm to 100-nm node reticles: an overview of preliminary results
;Hourd, Andrew C. ;Grimshaw, Anthony ;Scheuring, Gerd ;Gittinger, ChristianBrück, Hans-JürgenProceedings paper2002, 18th European Conference on Mask Technology for Integrated Circuits and Microcomponents, 14/01/2002, p.168-174