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Browsing by Author "Chen, Shaoyin"

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    Laser anneal of oxycarbosilane low-k film

    Redzheb, Murad
    ;
    Armini, Silvia  
    ;
    Vanstreels, Kris  
    ;
    Meersschaut, Johan  
    ;
    Baklanov, Mikhail
    Proceedings paper
    2016, International Interconnect Technology Conference/ Advanced Metallization Conference, 23/05/2016, p.156-158

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