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Browsing by Author "Chen, Weidong"

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    RCA and IMEC/SC2 clean: metallic immunity and gate oxide integrity

    Chen, Weidong
    ;
    Dhayagude, T.
    ;
    Chaparala, P.
    ;
    Demirlioglu, E.
    ;
    Shenasa, M.
    ;
    Bearda, Twan
    Proceedings paper
    1997, Science and Technology of Semiconductor Surface Preparation, 1/04/1997, p.225-232

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