Browsing by Author "Chen, Weidong"
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Publication RCA and IMEC/SC2 clean: metallic immunity and gate oxide integrity
;Chen, Weidong ;Dhayagude, T. ;Chaparala, P. ;Demirlioglu, E. ;Shenasa, M.Bearda, TwanProceedings paper1997, Science and Technology of Semiconductor Surface Preparation, 1/04/1997, p.225-232