Browsing by Author "Chen, Xuanxuan"
Now showing 1 - 3 of 3
- Results Per Page
- Sort Options
Publication Characterization of the shape and line-edge roughness of polymer gratings with grazing incidence small-angle X-ray scattering and atomic force microscopy
Journal article2016, Journal of Applied Crystallography, 49, p.823-834Publication Directed self-assembly of PS-b-PMMA with ionic liquid addition
Proceedings paper2015, 1st International Symposium on DSA, 26/10/2015Publication Grazing-incidence small angle x-ray scattering studies of nanoscale polymer gratings
Proceedings paper2015, Metrology, Inspection, and Process Control for Microlithography XXIX, 22/02/2015, p.94241N