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Browsing by Author "Cho, W."

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    Internal matrix structure of low-k nanoporous silica and its relation to mechanical properties

    Saxena, R.
    ;
    Rodriguez, O.
    ;
    Cho, W.
    ;
    Gills, W.N.
    ;
    Plawsky, J.L.
    ;
    Baklanov, Mikhaïl
    ;
    Mogilnikov, K.P.
    Journal article
    2004-12, Journal of Non-Chrystalline Solids, 349, p.189-199
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    Modification of nanoporous silica structures by fluorocarbon plasma treatment

    Cho, W.
    ;
    Saxena, R.
    ;
    Rodriguez, O.
    ;
    Achanta, R.
    ;
    Ojha, M.
    ;
    Plawsky, J.L.
    ;
    Gill, W.N.
    ;
    Baklanov, Mikhaïl
    Proceedings paper
    2004-06, Materials, Technology, and Reliability for Advanced Interconnects and Low-k Dielectrics, 12/04/2004, p.103-108

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