Browsing by Author "Cho, Younjin"
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Publication Photobase generator enabled pitch division: a progress report
;Gu, Xinyu ;Cho, Younjin ;Kawakami, Takanori ;Hagiwara, Yuji ;Rawlings, BrandonMesch, RyanProceedings paper2011, Advances in Resist Materials and Processing Technology XXVIII, 27/02/2011, p.7972-14