Browsing by Author "Choi, In-chan"

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Acidic cleaning solutions for post InGaAs CMP cleaning

Park, Jin-Goo
;
Purushothaman, Muthukrishnan
;
Lee, Jung-Hwan
;
Choi, In-chan
;
Kim, Hyun-Tae
Proceedings paper
2018-04, 20th Surface Preparation and Cleaning Conference - SPCC 2018, 9/04/2018
Development of post InGaAs CMP cleaning process for sub 10 nm device application

Purushothaman, Muthukrishnan
;
Choi, In-chan
;
Kim, Hyun-Tae
;
Teugels, Lieve
;
Kim, Tae-Gon
Meeting abstract
2017-10, International Conference on Planarization/CMP Technology - ICPT, 11/10/2017