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Browsing by Author "Clark, J G."

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    Epitaxial staircase structure for the calibration of electrical characterisation techniques

    Clarysse, Trudo
    ;
    Caymax, Matty  
    ;
    De Wolf, Peter
    ;
    Trenkler, Thomas
    ;
    Vandervorst, Wilfried  
    Proceedings paper
    1997, Proceedings 4th Int. Worksh. on the Measurement, Characterization and Modelling of Ultra-Shallow Doping Profiles in Semiconducto, 6/04/1997, p.30.1-30.1

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