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Browsing by Author "Clauws, P"

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    Impact of direct plasma hydrogenation on thermal donor formation in N-type CZ silicon

    Rafi, Joan Marc
    ;
    Simoen, Eddy  
    ;
    Claeys, Cor
    ;
    Huang, Y.L.
    ;
    Ulyashin, A.G.
    ;
    Job, R.
    ;
    Versluys, J.
    Journal article
    2005, Journal of the Electrochemical Society, (152) 1, p.G16-G24

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