Browsing by Author "Cobb, Jonathan"
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Publication EUV modeling accruracy and integration requirements for the 16nm node
;Zavyalova, Lena ;Su, Irene ;Jang, Stephen ;Cobb, Jonathan ;Ward, Brian ;Sorensen, JacobSong, HuaProceedings paper2010, Extreme Ultraviolet (EUV) Lithography, 21/02/2010, p.763627