Browsing by Author "Cobianu, Cornel"
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Publication Design and analysis of an in-plane resonant nano-electro-mechanical sensor for sub-attogram-level molecular mass-detection
Proceedings paper2009, Solid State Devices and Materials Conference - SSDM, 7/10/2009, p.J-6-5Publication Mass-detection based in-plane resonant nano-electro-mechanical sensors
Oral presentation2013, Japan Society of Applied Physics (JSAP) Annual MeetingPublication Numerical analysis of zeptogram/Hz-level mass responsivity for in-plane resonant nano-electro-mechanical sensors
Journal article2011, Microelectronic Engineering, (88) 9, p.2879-2894Publication Towards nano-scale resonant gas sensors