Browsing by Author "Coene, Wim M.J."
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Publication Wafer based aberration metrology for lithographic systems using overlay measurements on targets imaged from phase-shift gratings
;van Haver, Sven ;Coene, Wim M.J.; ;Geypen, Niels; de Winter, LaurensJournal article2014, Applied Optics, (53) 12, p.2562-2582