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Browsing by Author "Collart, E.H."

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    Co-implantation with conventional spike anneal solutions for 45 nm ultra-shallow junction formation

    Collart, E.H.
    ;
    Felch, S.B.
    ;
    Graoui, H.
    ;
    Kirkwood, D.
    ;
    Pawlak, Bartek  
    ;
    Absil, Philippe  
    Proceedings paper
    2005, USJ - The 8th Int. Workshop on the Fabrication, Characterization and Modeling of Ultra Shallow Junctions in Semiconductors, 5/06/2005

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