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Browsing by Author "Conley, P."

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    CD control using SiON BARL processing for sub 0.25µm lithography

    Zhang, Fenghong
    ;
    Op de Beeck, Maaike  
    ;
    Ronse, Kurt  
    ;
    Gangala, Hareen K
    ;
    Gopalan, P.
    ;
    Conley, P.
    Oral presentation
    1998, MNE 98 - Micro- and Nano-Engineering Conference; 22-24 Sept. 1998; Leuven, Belgium.

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