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Browsing by Author "Corigliano, Alberto"

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    Polysilicon MEMS accelerometers exposed to shocks: numerical-experimental investigation

    Ghisi, Aldo
    ;
    Kalicinski, Stanislaw
    ;
    Mariani, Stefano
    ;
    De Wolf, Ingrid  
    ;
    Corigliano, Alberto
    Journal article
    2009, Journal of Micromechanics and Microengineering, (19) 3, p.35023

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